CMOS vertical hall magnetic sensors on flexible substrate

Heidari, H., Bonizzoni, E., Gatti, U., Maloberti, F. and Dahiya, R. (2016) CMOS vertical hall magnetic sensors on flexible substrate. IEEE Sensors Journal, 16(24), pp. 8736-8743. (doi:10.1109/JSEN.2016.2575802)

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Abstract

This paper presents the realization of different Vertical Hall Sensors (VHSs) implemented using a 0.18-μm CMOS technology and mounted on flexible substrates. Various geometries of VHS have been studied to obtain the optimum sensor device dimension and shape. COMSOL multiphysics simulation results are validated with respect to the electrical behaviour of an 8-resistor Verilog-A model implemented in Cadence environment. Simulation and measurement results are in good agreement. The use of polymeric foils and current spinning technique compensate for the effects caused by mechanical stress and possible fabrication imperfections. Measurement results for a low-offset basic VHS in planar state show a sensitivity of 59±1 V(AT)-1 in voltage-mode and of 8±0.1 %T-1 in current-mode.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Dahiya, Dr Ravinder and Heidari, Dr Hadi
Authors: Heidari, H., Bonizzoni, E., Gatti, U., Maloberti, F., and Dahiya, R.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:IEEE Sensors Journal
Publisher:IEEE
ISSN:1530-437X
ISSN (Online):1558-1748
Published Online:02 June 2016
Copyright Holders:Copyright © 2016 Institute of Electrical and Electronics Engineers
First Published:First published in IEEE Sensors Journal 16(24):8736-8743
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
659051Flexible Electronics Device Modelling (FLEXELDEMO)Ravinder DahiyaEngineering & Physical Sciences Research Council (EPSRC)EP/M002519/1ENG - ENGINEERING ELECTRONICS & NANO ENG