Heidari, H. , Bonizzoni, E., Gatti, U., Maloberti, F. and Dahiya, R. (2016) CMOS vertical hall magnetic sensors on flexible substrate. IEEE Sensors Journal, 16(24), pp. 8736-8743. (doi: 10.1109/JSEN.2016.2575802)
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Abstract
This paper presents the realization of different Vertical Hall Sensors (VHSs) implemented using a 0.18-μm CMOS technology and mounted on flexible substrates. Various geometries of VHS have been studied to obtain the optimum sensor device dimension and shape. COMSOL multiphysics simulation results are validated with respect to the electrical behaviour of an 8-resistor Verilog-A model implemented in Cadence environment. Simulation and measurement results are in good agreement. The use of polymeric foils and current spinning technique compensate for the effects caused by mechanical stress and possible fabrication imperfections. Measurement results for a low-offset basic VHS in planar state show a sensitivity of 59±1 V(AT)-1 in voltage-mode and of 8±0.1 %T-1 in current-mode.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Dahiya, Professor Ravinder and Heidari, Professor Hadi |
| Authors: | Heidari, H., Bonizzoni, E., Gatti, U., Maloberti, F., and Dahiya, R. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | IEEE Sensors Journal |
| Publisher: | IEEE |
| ISSN: | 1530-437X |
| ISSN (Online): | 1558-1748 |
| Published Online: | 02 June 2016 |
| Copyright Holders: | Copyright © 2016 Institute of Electrical and Electronics Engineers |
| First Published: | First published in IEEE Sensors Journal 16(24):8736-8743 |
| Publisher Policy: | Reproduced in accordance with the copyright policy of the publisher |
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