Airborne particle deposition in cleanrooms: relationship between deposition rate and airborne concentration

Whyte, W. , Agricola, K. and Derks, M. (2016) Airborne particle deposition in cleanrooms: relationship between deposition rate and airborne concentration. Clean Air and Containment Review, 25, pp. 4-10.

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Publisher's URL: http://www.cleanairandcontainment.com/journal-contents-list/25/

Abstract

This article is the second of a series that discusses the deposition of airborne particles onto cleanroom surfaces. It investigates the relationship between the airborne concentration of a range of cumulative sizes of particles and the particle deposition rate (PDR) onto cleanroom surfaces, through knowledge of the deposition velocity of particles in air. The deposition velocity of a range of cumulative particle sizes was obtained by means of experiments, theoretical calculations, and literature search and the influence of a number of variables found in cleanrooms on the deposition velocity was investigated. The use of the deposition velocity to calculate the amount of deposition on cleanroom surfaces, such as manufactured products, is discussed, along with its use in deciding the required ISO 14644-1 class of cleanroom; these subjects will be discussed in more depth in the final article of this series.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Whyte, Dr William
Authors: Whyte, W., Agricola, K., and Derks, M.
College/School:College of Science and Engineering > School of Engineering
Journal Name:Clean Air and Containment Review
Publisher:Euromed Communications
Copyright Holders:Copyright © 2016 Euromed Communications
First Published:First published in Clean Air and Containment Review 25:4-10
Publisher Policy:Reproduced with the permission of the publisher.

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