Ferreira, R., Cardoso, S., Freitas, P. P., Petrova, R. and McVitie, S. (2012) Influence of ion beam assisted deposition parameters on the growth of MgO and CoFeB. Journal of Applied Physics, 111(7), 07C117. (doi: 10.1063/1.3678319)
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Abstract
The effect of the kinetic parameters of an assistance ion beam on the crystallization of ion beamdeposited MgO was investigated. It is shown that the crystallization of MgO in the as-deposited state is strongly dependent on the assistance beam parameters. Furthermore, two deposition regimes corresponding to different ranges of the assistance beamenergy are found. XRD and TEM studies of CoFeB/MgO/CoFeB with MgO deposited in the two regimes show that CoFeB crystallization is favored when low energy assist beams are used, despite no differences being found in the MgO.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | McVitie, Professor Stephen and Petrova, Dr Rumyana |
| Authors: | Ferreira, R., Cardoso, S., Freitas, P. P., Petrova, R., and McVitie, S. |
| College/School: | College of Science and Engineering > School of Physics and Astronomy |
| Journal Name: | Journal of Applied Physics |
| Publisher: | American Institute of Physics |
| ISSN: | 0021-8979 |
| ISSN (Online): | 1089-7550 |
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