Influence of ion beam assisted deposition parameters on the growth of MgO and CoFeB

Ferreira, R., Cardoso, S., Freitas, P. P., Petrova, R. and McVitie, S. (2012) Influence of ion beam assisted deposition parameters on the growth of MgO and CoFeB. Journal of Applied Physics, 111(7), 07C117. (doi:10.1063/1.3678319)

Full text not currently available from Enlighten.

Abstract

The effect of the kinetic parameters of an assistance ion beam on the crystallization of ion beamdeposited MgO was investigated. It is shown that the crystallization of MgO in the as-deposited state is strongly dependent on the assistance beam parameters. Furthermore, two deposition regimes corresponding to different ranges of the assistance beamenergy are found. XRD and TEM studies of CoFeB/MgO/CoFeB with MgO deposited in the two regimes show that CoFeB crystallization is favored when low energy assist beams are used, despite no differences being found in the MgO.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:McVitie, Professor Stephen and Petrova, Dr Rumyana
Authors: Ferreira, R., Cardoso, S., Freitas, P. P., Petrova, R., and McVitie, S.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Journal of Applied Physics
Publisher:American Institute of Physics
ISSN:0021-8979
ISSN (Online):1089-7550

University Staff: Request a correction | Enlighten Editors: Update this record