Monolithic Fabrication of InSb-based Photo-Pixel for Mid-IR Imaging

Xie, C., Pusino, V. , Khalid, A. , Aziz, M., Steer, M. J. and Cumming, D. R.S. (2016) Monolithic Fabrication of InSb-based Photo-Pixel for Mid-IR Imaging. In: 2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS), Toyama, Japan, 26-30 Jun 2016, ISBN 9781509019649 (doi:10.1109/ICIPRM.2016.7528581)

Xie, C., Pusino, V. , Khalid, A. , Aziz, M., Steer, M. J. and Cumming, D. R.S. (2016) Monolithic Fabrication of InSb-based Photo-Pixel for Mid-IR Imaging. In: 2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS), Toyama, Japan, 26-30 Jun 2016, ISBN 9781509019649 (doi:10.1109/ICIPRM.2016.7528581)

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Abstract

We present the monolithic fabrication of an active photo-pixel made in InSb on a GaAs substrate that is suitable for large-scale integration into a focal plane array. Pixel addressing is provided by the co-integration of a GaAs MESFET with an InSb photodiode. Various highly selective etch processes for distinct material layers were established. A low temperature annealed Ohmic contact was also achieved so that the processing temperature never exceeded 180 ˚C and no damage to the InSb detectors was observed. Furthermore, since there is a considerable etch step (> 6 μm) that metal must straddle without breaking, we developed an intermediate step using polyimide to provide a smoothing section between the lower MESFET and upper photodiode regions of the device. This heterogeneous technology creates great potential to realize a new type of monolithic focal plane array of addressable pixels for imaging in the medium wavelength infrared range.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Steer, Dr Matthew and Khalid, Dr Ata-ul-Habib and Cumming, Professor David and Aziz, Dr Mohsin and Pusino, Mr Vincenzo
Authors: Xie, C., Pusino, V., Khalid, A., Aziz, M., Steer, M. J., and Cumming, D. R.S.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
ISBN:9781509019649
Published Online:04 August 2016
Copyright Holders:Copyright © 2016 IEEE
First Published:First published in 2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS)
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher
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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
588331Triple wavelength superspectral camera focal-plane array (SUPERCAMERA)David CummingEngineering & Physical Sciences Research Council (EPSRC)EP/J018678/1ENG - ENGINEERING ELECTRONICS & NANO ENG
588332Triple wavelength superspectral camera focal-plane array (SUPERCAMERA)David CummingEngineering & Physical Sciences Research Council (EPSRC)EP/J018678/1ENG - ENGINEERING ELECTRONICS & NANO ENG
6672319UK Quantum Technology Hub in Enhanced Quantum ImagingMiles PadgettEngineering & Physical Sciences Research Council (EPSRC)EP/M01326X/1S&E P&A - PHYSICS & ASTRONOMY