Flexible MISFET devices from transfer printed Si microwires and spray coating

Khan, S., Lorenzelli, L. and Dahiya, R. (2016) Flexible MISFET devices from transfer printed Si microwires and spray coating. IEEE Journal of the Electron Devices Society, 4(4), pp. 189-196. (doi:10.1109/JEDS.2016.2559586)

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Abstract

This paper presents two types of MISFETs (Metal Insulator Field Effect Transistors) devices fabricated from Si microwires through a new manufacturing route involving a combination of printing and microfabrication technologies. Si microwires, developed through standard photolithography and etching steps, are transferred from a SOI (silicon on insulator) wafer onto polyimide (PI) using stamp-assisted transfer printing. The MISFETs are then obtained by spray coating the dielectric layer and metal contact layer. Spray coating has been introduced here for the first time for deposition of organic dielectric on transfer printed Si microwires. Two groups of the devices are fabricated, one based on a single Si microwire and the other based on the array of 15 microwires of similar dimensions. The variations in the output response of the two groups of devices has been investigated. The devices based on array of microwires are observed to have less variation in the output response, with lesser standard deviations as compared to MISFETs made from single Si microwires.

Item Type:Articles
Additional Information:This work was supported in part by the European Commission under grant agreements PITN–GA–2012–317488-CONTEST, and EPSRC Fellowship for Growth – Printable Tactile Skin (EP/M002527/1).
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Dahiya, Professor Ravinder
Authors: Khan, S., Lorenzelli, L., and Dahiya, R.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:IEEE Journal of the Electron Devices Society
Publisher:IEEE
ISSN:2168-6734
ISSN (Online):2168-6734
Published Online:03 May 2016
Copyright Holders:Copyright © 2016 The Authors
First Published:First published in Journal of the Electron Devices Society 4(4):189-196
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
663861Engineering Fellowships for Growth: Printed Tactile SKINRavinder DahiyaEngineering & Physical Sciences Research Council (EPSRC)EP/M002527/1ENG - ENGINEERING ELECTRONICS & NANO ENG