Multilayer Techniques for MMICs

Khalid, A. H. , Gokdemir, T., Economides, S., Rezazadeh, A. A. and Robertson, I. D. (1996) Multilayer Techniques for MMICs. EE Colloquium on Advanced Developments in Microelectronic Engineering, London, UK, 15 Nov 1996. p. 6. (doi:10.1049/ic:19961245)

Khalid, A. H. , Gokdemir, T., Economides, S., Rezazadeh, A. A. and Robertson, I. D. (1996) Multilayer Techniques for MMICs. EE Colloquium on Advanced Developments in Microelectronic Engineering, London, UK, 15 Nov 1996. p. 6. (doi:10.1049/ic:19961245)

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Abstract

MMICs still use large numbers of passive components, both lumped elements (spiral inductors and overlay capacitors) and transmission lines and couplers. The area consumed by these can be drastically reduced by the use of multilayer techniques. However, producing MMICs with 3 or more metal layers requires research into the fabrication techniques as well as investigating the modelling and design problems. This paper describes these multilayer techniques which are expected to facilitate an increase in the packing density of commercially fabricated MMICs in the future

Item Type:Conference or Workshop Item
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Khalid, Dr Ata-ul-Habib
Authors: Khalid, A. H., Gokdemir, T., Economides, S., Rezazadeh, A. A., and Robertson, I. D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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