Airborne particle deposition in cleanrooms: deposition mechanisms

Whyte, W. , Agricola, K. and Derks, M. (2015) Airborne particle deposition in cleanrooms: deposition mechanisms. Clean Air and Containment Review, 24, pp. 4-9.

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Abstract

This article discusses the mechanisms of particle deposition onto cleanroom surfaces. The main mechanism for particles above about 0.5μm is gravitational settling. Turbulent deposition and electrostatic attraction can also occur at all particle sizes, and for particles below 0.5μm Brownian diffusion is important. Measurements of particle deposition rates (PDRs) were made of particles ≥ 0μm on witness plates orientated in different directions and exposed in different ventilation conditions, and it was concluded that over 80% of particles were deposited by gravitational sedimentation, and probably more than half of the remainder by turbulent deposition.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Whyte, Dr William
Authors: Whyte, W., Agricola, K., and Derks, M.
College/School:College of Science and Engineering > School of Engineering
Journal Name:Clean Air and Containment Review
Publisher:Euromed Communications
Copyright Holders:Copyright © 2015 Euromed Communications
First Published:First published in Clean Air and Containment Review 24:4-9
Publisher Policy:Reproduced with the permission of the publisher.

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