Monolithic integration of an active InSb-based mid-infrared photo-pixel with a GaAs MESFET

Xie, C., Pusino, V. , Khalid, A.-u.-H. , Steer, M., Sorel, M., Thayne, I. and Cumming, D. (2015) Monolithic integration of an active InSb-based mid-infrared photo-pixel with a GaAs MESFET. IEEE Transactions on Electron Devices, 62(12), pp. 4069-4075. (doi:10.1109/TED.2015.2492823)

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Abstract

Medium wavelength infrared detectors are of increasing importance in defense, security, commercial and environmental applications. Enhanced integration will lead to greater resolution and lower cost focal plane arrays. We present the monolithic fabrication of an active photo-pixel made in InSb on a GaAs substrate that is suitable for large-scale integration into a focal plane array. Pixel addressing is provided by the co-integration of a GaAs MESFET with an InSb photodiode. Pixel fabrication was achieved by developing novel materials and process steps including isolation etches, a gate recess etch and low temperature processes to make Ohmic contacts to both the GaAs and InSb devices. Detailed electrical and optical measurements in an FTIR demonstrated that the photodiode was sensitive to radiation in the 3 to 5 μm range at room temperature, and that the device could be isolated from its contacts using the integrated MESFET. This heterogeneous technology creates great potential to realize a new type of monolithic focal plane array of addressable pixels for imaging in the medium wavelength infrared range.

Item Type:Articles
Additional Information:(c) 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Steer, Dr Matthew and Thayne, Professor Iain and Khalid, Dr Ata-ul-Habib and Cumming, Professor David and Sorel, Professor Marc and Pusino, Mr Vincenzo
Authors: Xie, C., Pusino, V., Khalid, A.-u.-H., Steer, M., Sorel, M., Thayne, I., and Cumming, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:IEEE Transactions on Electron Devices
Publisher:Institute of Electrical and Electronics Engineers
ISSN:0018-9383
ISSN (Online):1557-9646
Copyright Holders:Copyright © 2015 IEEE
First Published:First published in IEEE Transactions on Electron Devices 62(12):4069-4075
Publisher Policy:Reproduced with permission of the publisher

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
588331Triple wavelength superspectral camera focal-plane array (SUPERCAMERA)David CummingEngineering & Physical Sciences Research Council (EPSRC)EP/J018678/1ENG - ENGINEERING ELECTRONICS & NANO ENG