Thick Film PZT Transducer Arrays for Particle Manipulation

Qiu, Y. , Wang, H., Bolhovitins, A., Demore, C., Cochran, S. , Gebhardt, S. and Schonecker, A. (2013) Thick Film PZT Transducer Arrays for Particle Manipulation. In: 2013 IEEE International Ultrasonics Symposium (IUS), Prague, Czech Republic, 21-25 Jul 2013, pp. 1911-1914. ISBN 9781467356862 (doi: 10.1109/ULTSYM.2013.0487)

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Abstract

This paper reports the fabrication and evaluation of a two-dimensional thick film PZT ultrasonic transducer array operating at about 7.5 MHz for particle manipulation. All layers on the array are screen-printed and sintered on an Al2O3 substrate without further processes or patterning. The measured dielectric constant of the PZT is 2250 ± 100, and the dielectric loss is 0.09 ± 0.005 at 10 kHz. Finite element analysis has been used to predict the behaviour of the array and impedance spectroscopy and laser vibrometry have been used to characterise its performance. The measured deflection of a single activate element is on the order of tens of nanometres with 20 Vpp input. Particle manipulation experiments have been performed by coupling the thick film array to a capillary containing polystyrene microspheres in water.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Qiu, Dr Yongqiang and Cochran, Professor Sandy and Demore, Dr Christine
Authors: Qiu, Y., Wang, H., Bolhovitins, A., Demore, C., Cochran, S., Gebhardt, S., and Schonecker, A.
College/School:College of Science and Engineering > School of Engineering > Systems Power and Energy
ISSN:1051-0117
ISBN:9781467356862
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