The thermoelectric properties of Ge/SiGe based superlattices: from materials to energy harvesting modules

Samarelli, A., Ferre Llin, L., Cecchi, S., Frigerio, J., Etzelstorfer, T., Muller Gubler, E., Stangl, J., Chrastina, D., Isella, G. and Paul, D. (2014) The thermoelectric properties of Ge/SiGe based superlattices: from materials to energy harvesting modules. ECS Transactions, 64(6), pp. 929-937. (doi:10.1149/06406.0929ecst)

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Abstract

We report recent progresses in the characterization of the vertical electrical and thermal properties of multilayered silicon germanium (SiGe) materials for thermoelectric coolers and generators. Superlattice structures p- and n-type doped with different barriers and quantum well thicknesses were grown by Low Energy Plasma Enhanced Chemical Vapor Deposition. The electrical and thermal characterizations were performed using fully integrated metrology structures, microfabricated on the surface of the sample. Heaters, thermometers and electrical contacts were integrated onto the device to allow a simultaneous measurement of the electrical, thermal and Seebeck coefficient for the extraction of the figure of merit ZT. Enhancements in the Seebeck coefficient up to 450 µV/K and the reduction of the thermal conductivity down to 2.2 W/mK are mainly attributed to the low dimensionality of the system. Preliminary tests on microfabricated modules are performed on a non-optimized material and device dimensions as proof of concept for next generation devices.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Ferre Llin, Dr Lourdes and Samarelli, Mr Antonio and Paul, Professor Douglas
Authors: Samarelli, A., Ferre Llin, L., Cecchi, S., Frigerio, J., Etzelstorfer, T., Muller Gubler, E., Stangl, J., Chrastina, D., Isella, G., and Paul, D.
College/School:College of Science and Engineering > School of Engineering
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:ECS Transactions
Publisher:The Electrochemical Society
ISSN:1938-6737
ISSN (Online):1938-5862

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