Extending the emission wavelength of Ge nanopillars to 2.25 μm using silicon nitride stressors

Millar, R.W., Gallacher, K., Samarelli, A., Frigerio, J., Chrastina, D., Isella, G., Dieing, T. and Paul, D.J. (2015) Extending the emission wavelength of Ge nanopillars to 2.25 μm using silicon nitride stressors. Optics Express, 23(14), pp. 18193-18202. (doi:10.1364/OE.23.018193) (PMID:26191877)

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Abstract

The room temperature photoluminescence from Ge nanopillars has been extended from 1.6 μm to above 2.25 μm wavelength through the application of tensile stress from silicon nitride stressors deposited by inductively-coupled-plasma plasma-enhanced chemical-vapour-deposition. Photoluminescence measurements demonstrate biaxial equivalent tensile strains of up to ~ 1.35% in square topped nanopillars with side lengths of 200 nm. Biaxial equivalent strains of 0.9% are observed in 300 nm square top pillars, confirmed by confocal Raman spectroscopy. Finite element modelling demonstrates that an all-around stressor layer is preferable to a top only stressor, as it increases the hydrostatic component of the strain, leading to an increased shift in the band-edge and improved uniformity over top-surface only stressors layers.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Millar, Mr Ross and Samarelli, Mr Antonio and Paul, Professor Douglas and Gallacher, Dr Kevin
Authors: Millar, R.W., Gallacher, K., Samarelli, A., Frigerio, J., Chrastina, D., Isella, G., Dieing, T., and Paul, D.J.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Optics Express
Publisher:Optical Society of America
ISSN:1094-4087
ISSN (Online):1094-4087
Copyright Holders:Copyright © 2015 Optical Society of America
First Published:First published in Optics Express 23(14):18193-18202
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher.

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
523621Room Temperature Terahertz Quantum Cascade Lasers on Silicon SubstratesDouglas PaulEngineering & Physical Sciences Research Council (EPSRC)EP/H02364X/1ENG - ENGINEERING ELECTRONICS & NANO ENG
634451GEMINIDouglas PaulEuropean Commission (EC)613055ENG - ENGINEERING ELECTRONICS & NANO ENG