Order within disorder: the atomic structure of ion-beam sputtered amorphous tantala (a-Ta2O5)

Bassiri, R. et al. (2015) Order within disorder: the atomic structure of ion-beam sputtered amorphous tantala (a-Ta2O5). APL Materials, 3(3), 036103. (doi:10.1063/1.4913586)

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Abstract

Amorphous tantala (a-Ta2O5) is a technologically important material often used in high-performance coatings. Understanding this material at the atomic level provides a way to further improve performance. This work details extended X-ray absorption fine structure measurements of a-Ta2O5 coatings, where high-quality experimental data and theoretical fits have allowed a detailed interpretation of the nearest-neighbor distributions. It was found that the tantalum atom is surrounded by four shells of atoms in sequence; oxygen, tantalum, oxygen, and tantalum. A discussion is also included on how these models can be interpreted within the context of published crystalline Ta 2O5 and other a-T2O5 studies.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Rowan, Professor Sheila and Abernathy, Mr Matthew and Martin, Dr Iain and MacLaren, Dr Ian and Bassiri, Mr Riccardo and HART, Martin
Authors: Bassiri, R., Liou, F., Abernathy, M. R., Lin, A. C., Kim, N., Mehta, A., Shyam, B., Byer, R. L., Gustafson, E. K., HART, M., MacLaren, I., Martin, I. W., Route, R. K., Rowan, S., Stebbins, J. F., and Fejer, M. M.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:APL Materials
Publisher:AIP Publishing
ISSN:2166-532X
ISSN (Online):2166-532X
Copyright Holders:Copyright © 2015 The Authors
First Published:First published in APL Materials 3(3):036103
Publisher Policy:Reproduced under a Creative Commons License

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