Kompa, G. and Wasige, E. (2000) Quasi-monolithic hybrid technology based on Si micromachining and low-temperature thin-film processing. In: MICRO.tec 2000, VDE World Microtechnologies Congress, Hannover, Germany, 25-27 Sep 2000, pp. 109-114.
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Abstract
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| Item Type: | Conference Proceedings |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Wasige, Professor Edward |
| Authors: | Kompa, G., and Wasige, E. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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