Low Temperature Ohmic Contacts to AlGaN/GaN HFETs on Si Substrates Using SiCl4 Based RIE Recess Etching

Li, X. , Ternent, G., Al-Khalidi, A. , Floros, K., Wasige, E. and Thayne, I. G. (2014) Low Temperature Ohmic Contacts to AlGaN/GaN HFETs on Si Substrates Using SiCl4 Based RIE Recess Etching. In: UK Semiconductors 2014, Sheffield, UK, 9-10 Jul 2014, p. 176.

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Publisher's URL: http://ssg.sheffield.ac.uk/events/uk-semiconductors-2014/

Abstract

No abstract available.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Wasige, Professor Edward and Li, Dr Xu and Thayne, Professor Iain and Ternent, Dr Gary and Al-Khalidi, Dr Abdullah
Authors: Li, X., Ternent, G., Al-Khalidi, A., Floros, K., Wasige, E., and Thayne, I. G.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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