A large transistor-based sensor array chip for direct extracellular imaging

Milgrew, M.J., Riehle, M.O. and Cumming, D.R.S. (2005) A large transistor-based sensor array chip for direct extracellular imaging. Sensors and Actuators B: Chemical, 111, pp. 347-353. (doi: 10.1016/j.snb.2005.01.020)

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Publisher's URL: http://dx.doi.org/10.1016/j.snb.2005.01.020


This paper describes the development and evaluation of a large transistor-based sensor array chip for direct extracellular imaging. All of the sensors and electronics are designed and fabricated using an unmodified CMOS process. The sensor array chip consists of a 16×16 pixel array of ISFETs along with signal acquisition and readout circuitry. Each ISFET employs a floating gate electrode structure and uses the passivation layer as a pH sensitive membrane. The chip layout is optimised so that the surface topography allows cultured cells to be grown directly above the pixel array. On return from the foundry, a double layer of SU-8 photoresist is used to provide a biocompatible and waterproof package for the chip. An elastomer-based microfluidic chamber is fabricated and integrated for conducting long term cell culture experiments. The performance of the chip is evaluated using an electrolyte and a well-established confluent cell line. The fabricated circuit provides a linear operating range of 2.5 V that allows each ISFET to operate as a pH sensor in the array. The ISFETs have a threshold voltage of − 1.5 V and a sensitivity of 46 mV/pH.<p></p>

Item Type:Articles
Glasgow Author(s) Enlighten ID:Cumming, Professor David and Riehle, Dr Mathis
Authors: Milgrew, M.J., Riehle, M.O., and Cumming, D.R.S.
College/School:College of Medical Veterinary and Life Sciences > School of Molecular Biosciences
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Sensors and Actuators B: Chemical

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
292521Scalable nanotechnology for integrated sensor arraysDavid CummingEngineering & Physical Sciences Research Council (EPSRC)GR/A10987Electronic and Nanoscale Engineering